Electrical Engineering 290P

Title Thin Film Technology for IC Fabrication
Units 3
Description The course will focus on the preparation and properties of thin-film electronic (dielectrics, metals, single-crystal and polycrystalline semiconductors). Topics will include: Basic Vacuum Technology; Theories of Condensation, Nucleation and Growth of Thin Films; Deposition Techniques (CVD, vaporization, sputtering); Epitaxial Growth of Semiconductors (MBE, VPE, LPE); Defects and Impurities in Thin Films; Thin Film Interfaces (dielectrics, metals and heterojunctions); Thin-Film Reliability of IC (electromigration, thin diaelectrics, VLSI Materialization); Modification of Thin-Film Properties (ion implantation, rapid thermal processing); Mechanical Properties and Characterization Techniques of Thin Films.
Sections Instructor Teaching Effectiveness How worthwhile was this course?
Fall 2016 Jose Carmena 5.8 / 7 5.9 / 7
Fall 2014 Jose Carmena 6.3 / 7 5.9 / 7
Fall 2012 Jose Carmena 6.0 / 7 5.8 / 7
Fall 2010 Jose Carmena 6.0 / 7 5.9 / 7
Fall 2006 Jonathan Sprinkle 4.9 / 7 5.3 / 7
Spring 2006 Jose Carmena 5.6 / 7 5.7 / 7
Spring 1994 Nathan W. Cheung 5.6 / 7 5.6 / 7
Fall 1988 Nathan W. Cheung 6.4 / 7 6.3 / 7
Overall Rating Teaching Effectiveness How worthwhile was this course?
5.8 / 7 5.8 / 7
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