| Description |
The course will focus on the preparation and properties of thin-film electronic (dielectrics, metals, single-crystal and polycrystalline semiconductors). Topics will include: Basic Vacuum Technology; Theories of Condensation, Nucleation and Growth of Thin Films; Deposition Techniques (CVD, vaporization, sputtering); Epitaxial Growth of Semiconductors (MBE, VPE, LPE); Defects and Impurities in Thin Films; Thin Film Interfaces (dielectrics, metals and heterojunctions); Thin-Film Reliability of IC (electromigration, thin diaelectrics, VLSI Materialization); Modification of Thin-Film Properties (ion implantation, rapid thermal processing); Mechanical Properties and Characterization Techniques of Thin Films. |
