Electrical Engineering 246
| Title | Microelectromechanical Systems (MEMS) |
|---|---|
| Units | 3 |
| Prerequisites | Graduate standing or consent of instructor. |
| Description | This course is aimed to provide basic understanding of integrated circuit (IC) processes and microelectromechanical system (MEMS). Technologies including analyses, design, and manufacturing processes of MEMS will be introduced. The first part of the course emphasizes IC processes including thin film deposition, lithography, and etching. The second part of the course deals with micromachining processes including surface-, bulk-micromachining, LIGA and other processes. Also listed as Mechanical Engineering C219. |
| Sections | Instructor | Teaching Effectiveness | How worthwhile was this course? |
|---|---|---|---|
| Spring 2010 | Liwei Lin | ||
| Spring 2009 | Albert Pisano | ||
| Spring 2008 | Albert Pisano | ||
| Spring 2005 | Albert Pisano | ||
| Spring 2004 | Albert Pisano | ||
| Spring 2002 | Albert Pisano | ||
| Spring 1993 | Edward L. Keller | ||
| Spring 1992 | Edward L. Keller | ||
| Spring 1991 | Edward L. Keller | ||
| Spring 1989 | Edward L. Keller | ||
| Overall Rating | Teaching Effectiveness | How worthwhile was this course? | |