Electrical Engineering 245

Title Introduction to MEMS Design
Units 3
Prerequisites Graduate standing in engineering or science; undergraduates with consent of instructor.
Description Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro- and nano-fabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. Also listed as Mechanical Engineering C218.
Sections Instructor Teaching Effectiveness How worthwhile was this course?
Fall 2012 Clark Nguyen 6.4 / 7 6.8 / 7
Fall 2011 Clark Nguyen 6.4 / 7 6.3 / 7
Fall 2010 Clark Nguyen 6.5 / 7 6.2 / 7
Fall 2009 Clark Nguyen 6.4 / 7 6.2 / 7
Fall 2008 Clark Nguyen 5.7 / 7 5.5 / 7
Fall 2007 Clark Nguyen 5.6 / 7 5.7 / 7
Spring 2007 Albert Pisano 6.1 / 7 5.2 / 7
Spring 2005 Kristofer Pister 5.1 / 7 5.2 / 7
Fall 2003 Uthara Srinivasan 5.6 / 7 5.8 / 7
Fall 2003 Roger T. Howe 5.4 / 7 5.6 / 7
Fall 2002 Kristofer Pister 5.2 / 7 5.3 / 7
Fall 2001 Kristofer Pister 5.5 / 7 5.5 / 7
Fall 2000 Kristofer Pister 5.7 / 7 5.8 / 7
Overall Rating Teaching Effectiveness How worthwhile was this course?
5.8 / 7 5.8 / 7
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