Electrical Engineering 245
| Title | Introduction to MEMS Design |
|---|---|
| Units | 3 |
| Prerequisites | Graduate standing in engineering or science; undergraduates with consent of instructor. |
| Description | Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro- and nano-fabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. Also listed as Mechanical Engineering C218. |
| Sections | Instructor | Teaching Effectiveness | How worthwhile was this course? |
|---|---|---|---|
| Fall 2012 | Clark Nguyen | ||
| Fall 2011 | Clark Nguyen | ||
| Fall 2010 | Clark Nguyen | ||
| Fall 2009 | Clark Nguyen | ||
| Fall 2008 | Clark Nguyen | ||
| Fall 2007 | Clark Nguyen | ||
| Spring 2007 | Albert Pisano | ||
| Spring 2005 | Kristofer Pister | ||
| Fall 2003 | Uthara Srinivasan | ||
| Fall 2003 | Roger T. Howe | ||
| Fall 2002 | Kristofer Pister | ||
| Fall 2001 | Kristofer Pister | ||
| Fall 2000 | Kristofer Pister | ||
| Overall Rating | Teaching Effectiveness | How worthwhile was this course? | |