Electrical Engineering 239

Title	Partially Ionized Plasmas
Units	3
Prerequisites	Upper division course in electromagnetics or fluid dynamics.
Description	Introduction to partially ionized, chemically reactive plasmas, including collisional processes, diffusion, sources, sheaths, boundaries, and diagnostics. DC, RF, and microwave discharges. Applications to plasma-assisted materials processing and to plasma wall interactions. Also listed as Applied Science and Technology C239.

Sections	Instructor	Teaching Effectiveness	How worthwhile was this course?
Spring 2007	Michael A. Lieberman	6.7 / 7	6.6 / 7
Spring 2005	Michael A. Lieberman	6.3 / 7	6.2 / 7
Spring 2003	Michael A. Lieberman	6.4 / 7	6.3 / 7
Spring 2001	Michael A. Lieberman	6.6 / 7	6.4 / 7
Spring 2000	Michael A. Lieberman	6.5 / 7	6.5 / 7
Spring 1999	Michael A. Lieberman	6.0 / 7	6.5 / 7
Spring 1998	Michael A. Lieberman	6.0 / 7	6.7 / 7
Spring 1996	Michael A. Lieberman	6.4 / 7	6.6 / 7
Spring 1995	Michael A. Lieberman	6.4 / 7	6.3 / 7
Spring 1994	Michael A. Lieberman	6.4 / 7	6.0 / 7
Overall Rating		Teaching Effectiveness	How worthwhile was this course?
		6.4 / 7	6.4 / 7