Electrical Engineering 147

Title Introduction to Microelectromechanical Systems (MEMS)
Units 3
Description his course will teach fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other technologies that are central to MEMS fabrication. It will pay special attention to teaching of fundamentals necessary for the design and analysis of devices and systems in mechanical, electrical, fluidic, and thermal energy/signal domains, and will teach basic techniques for multi-domain analysis. Fundamentals of sensing and transduction mechanisms including capacitive and piezoresistive techniques, and design and analysis of micmicromachined miniature sensors and actuators using these techniques will be covered.
Course Guide Course Guide
Sections Instructor Teaching Effectiveness How worthwhile was this course?
Fall 2016 Kristofer Pister 6.2 / 7 5.3 / 7
Fall 2015 Kristofer Pister 6.5 / 7 6.4 / 7
Fall 2014 Kristofer Pister 6.4 / 7 6.3 / 7
Fall 2013 Kristofer Pister 5.9 / 7 6.1 / 7
Spring 2011 Long-Sheng Fan 4.8 / 7 5.2 / 7
Spring 2010 Michel Maharbiz 6.1 / 7 6.0 / 7
Fall 1989 Charles Susskind 4.9 / 7 5.3 / 7
Spring 1989 Charles Susskind 5.2 / 7 5.4 / 7
Overall Rating Teaching Effectiveness How worthwhile was this course?
5.8 / 7 5.7 / 7
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