Electrical Engineering 143

Title Microfabrication Technology
Units 4
Prerequisites 40 and Physics 7B.
Description Integrated circuit device fabrication and surface micromachining technology. Thermal oxidation, ion implantation, impurity diffusion, film deposition, expitaxy, lithography, etching, contacts and interconnections, and process integration issues. Device design and mask layout, relation between physical structure and electrical/mechanical performance. MOS transistors and poly-Si surface microstructures will be fabricated in the laboratory and evaluated.
Course Guide Course Guide
Sections Instructor Teaching Effectiveness How worthwhile was this course?
Fall 2016 Ming Wu 6.0 / 7 5.7 / 7
Spring 2016 Ali Javey 6.3 / 7 6.1 / 7
Fall 2015 Ali Javey 6.2 / 7 5.7 / 7
Spring 2015 Ali Javey 6.4 / 7 6.5 / 7
Fall 2014 Clark Nguyen 6.3 / 7 6.5 / 7
Spring 2014 Ali Javey 6.7 / 7 6.3 / 7
Fall 2013 Ana Claudia Arias 5.2 / 7 5.9 / 7
Spring 2013 Ali Javey 6.5 / 7 6.1 / 7
Fall 2012 Ali Javey 6.2 / 7 6.1 / 7
Spring 2012 Jeffrey Bokor 5.1 / 7 5.8 / 7
Fall 2011 Ali Javey 6.8 / 7 6.7 / 7
Spring 2011 Jeffrey Bokor 5.4 / 7 5.5 / 7
Fall 2010 Nathan W. Cheung 6.1 / 7 6.2 / 7
Spring 2010 Clark Nguyen 6.5 / 7 6.4 / 7
Fall 2009 Ali Javey 6.2 / 7 6.1 / 7
Spring 2009 Ali Javey 6.5 / 7 6.4 / 7
Fall 2008 Ali Javey 5.9 / 7 6.1 / 7
Spring 2008 Ali Javey 6.6 / 7 6.3 / 7
Fall 2007 Vivek Subramanian 6.7 / 7 6.3 / 7
Spring 2007 Vivek Subramanian 6.3 / 7 6.1 / 7
Fall 2006 Vivek Subramanian 5.8 / 7 5.9 / 7
Spring 2006 Nathan W. Cheung 5.8 / 7 5.9 / 7
Fall 2005 Nathan W. Cheung 5.4 / 7 5.9 / 7
Spring 2005 Nathan W. Cheung 5.3 / 7 5.3 / 7
Fall 2004 Nathan W. Cheung 5.6 / 7 5.8 / 7
Spring 2004 Costas J. Spanos 5.5 / 7 6.0 / 7
Fall 2003 Nathan W. Cheung 5.2 / 7 5.9 / 7
Spring 2003 Nathan W. Cheung 5.8 / 7 5.9 / 7
Fall 2002 Nathan W. Cheung 5.0 / 7 5.6 / 7
Spring 2002 Andrew R. Neureuther 4.7 / 7 5.8 / 7
Fall 2001 Nathan W. Cheung 5.3 / 7 5.7 / 7
Spring 2001 Nathan W. Cheung 5.5 / 7 5.6 / 7
Fall 2000 Nathan W. Cheung 6.0 / 7 6.3 / 7
Spring 2000 Nathan W. Cheung 6.0 / 7 5.8 / 7
Fall 1999 Tsu-Jae King Liu 6.0 / 7 6.0 / 7
Spring 1999 Nathan W. Cheung 4.9 / 7 5.8 / 7
Fall 1998 William G. Oldham 4.9 / 7 5.5 / 7
Spring 1998 Tsu-Jae King Liu 6.3 / 7 6.3 / 7
Fall 1997 Nathan W. Cheung 5.9 / 7 5.9 / 7
Spring 1997 Costas J. Spanos 5.4 / 7 5.3 / 7
Fall 1996 Nathan W. Cheung 5.7 / 7 5.9 / 7
Spring 1996 Nathan W. Cheung 5.7 / 7 6.0 / 7
Fall 1995 Nathan W. Cheung 6.0 / 7 5.9 / 7
Spring 1995 Costas J. Spanos 4.9 / 7 5.3 / 7
Fall 1994 Andrew R. Neureuther 4.9 / 7 5.2 / 7
Spring 1994 Nathan W. Cheung 6.6 / 7 6.4 / 7
Fall 1993 Costas J. Spanos 5.9 / 7 6.4 / 7
Spring 1993 Costas J. Spanos 5.5 / 7 5.7 / 7
Fall 1992 Andrew R. Neureuther 5.2 / 7 5.3 / 7
Spring 1992 Ping Ko 6.3 / 7 6.1 / 7
Fall 1991 William G. Oldham 4.9 / 7 4.8 / 7
Spring 1991 William G. Oldham 5.0 / 7 5.1 / 7
Fall 1990 Nathan W. Cheung 5.7 / 7 5.7 / 7
Spring 1990 Nathan W. Cheung 5.9 / 7 6.0 / 7
Fall 1989 Roger T. Howe 5.9 / 7 5.8 / 7
Spring 1989 Nathan W. Cheung 5.5 / 7 5.6 / 7
Fall 1988 Ping Ko 6.5 / 7 6.2 / 7
Overall Rating Teaching Effectiveness How worthwhile was this course?
5.8 / 7 5.9 / 7
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