| Title |
Microfabrication Equipment Laboratory |
| Units |
2 |
| Prerequisites |
40 or 100, Mathematics 53 and 54, Physics 7B; an upper division course on microfabrication technology or manufacturing is recommended but not required (e.g., Chemical Engineering 179, Electrical Engineering 143, Mechanical Engineering 101, 122, Materials Science 111, 123, 125. |
| Description |
Experiments and simulations illustrating the fundamental principles of equipment and measurement technology for microelectronic and microelectromechanical fabrication and manufacturing. The experiments involve investigation and measurements of high vacuum systems, plasma-assisted etching and film deposition, high temperature silicon oxidation, photolithography, spin coating, chemical-mechanical polishing, and electroplating. Also listed as Mechanical Engineering C123, Materials Science and Engineering C133, and Chemical Engineering C133. |
