Electrical Engineering 290N

Title	Advanced Topics in System Theory
Units	1
Description	Current problems in integrated circuit process design and fabrication with emphasis on: (sub micron) lithography and planarization for multi-level metallization. Lectures will cover design rule theory; basic lithography issues; methods of dielectric and metal deposition and planarization; design of visual and electrical test patterns; and in process monitoring and control.

Sections	Instructor	Teaching Effectiveness	How worthwhile was this course?
Fall 2018	Jaijeet Roychowdhury	6.0 / 7	5.5 / 7
Fall 2017	Murat Arcak	6.5 / 7	6.0 / 7
Fall 2017	Andrew Packard	5.7 / 7	6.0 / 7
Fall 2014	Murat Arcak	6.5 / 7	6.2 / 7
Spring 2009	Leon O. Chua	6.4 / 7	6.4 / 7
Spring 2009	Seth Sanders	5.4 / 7	5.2 / 7
Spring 2009	Edward A. Lee	6.8 / 7	6.8 / 7
Fall 2008	Murat Arcak	6.6 / 7	6.1 / 7
Fall 2008	Fall 2008	Murat Arcak	6.6 / 7	6.1 / 7
Spring 2007	Fall 2008	Robert K. Brayton	6.7 / 7	6.4 / 7
Fall 2004	Edward A. Lee	6.6 / 7	6.6 / 7
Spring 2004	Robert K. Brayton	5.9 / 7	5.4 / 7
Spring 2002	Edward A. Lee	6.2 / 7	6.3 / 7
Fall 1999	Laurent El Ghaoui	5.7 / 7	6.2 / 7
Fall 1998	Felix F. Wu	6.6 / 7	6.9 / 7
Fall 1998	S. Verdu	5.7 / 7	6.3 / 7
Fall 1996	Edward A. Lee	5.8 / 7	5.8 / 7
Spring 1996	Ljiljana Trajkovic	5.5 / 7	5.5 / 7
Overall Rating		Teaching Effectiveness	How worthwhile was this course?
		6.2 / 7	6.1 / 7