Electrical Engineering 290N
Title | Advanced Topics in System Theory |
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Units | 1 |
Description | Current problems in integrated circuit process design and fabrication with emphasis on: (sub micron) lithography and planarization for multi-level metallization. Lectures will cover design rule theory; basic lithography issues; methods of dielectric and metal deposition and planarization; design of visual and electrical test patterns; and in process monitoring and control. |
Sections | Instructor | Teaching Effectiveness | How worthwhile was this course? |
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Fall 2018 | Jaijeet Roychowdhury | ||
Fall 2017 | Murat Arcak | ||
Andrew Packard | |||
Fall 2014 | Murat Arcak | ||
Spring 2009 | Leon O. Chua | ||
Spring 2009 | Seth Sanders | ||
Spring 2009 | Edward A. Lee | ||
Fall 2008 | Murat Arcak | ||
Fall 2008 | Murat Arcak | ||
Spring 2007 | Robert K. Brayton | ||
Fall 2004 | Edward A. Lee | ||
Spring 2004 | Robert K. Brayton | ||
Spring 2002 | Edward A. Lee | ||
Fall 1999 | Laurent El Ghaoui | ||
Fall 1998 | Felix F. Wu | ||
Fall 1998 | S. Verdu | ||
Fall 1996 | Edward A. Lee | ||
Spring 1996 | Ljiljana Trajkovic | ||
Overall Rating | Teaching Effectiveness | How worthwhile was this course? | |