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Note: This class is no longer being taught.

Title	Thin Film Technology for IC Fabrication
Units	3
Description	The course will focus on the preparation and properties of thin-film electronic (dielectrics, metals, single-crystal and polycrystalline semiconductors). Topics will include: Basic Vacuum Technology; Theories of Condensation, Nucleation and Growth of Thin Films; Deposition Techniques (CVD, vaporization, sputtering); Epitaxial Growth of Semiconductors (MBE, VPE, LPE); Defects and Impurities in Thin Films; Thin Film Interfaces (dielectrics, metals and heterojunctions); Thin-Film Reliability of IC (electromigration, thin diaelectrics, VLSI Materialization); Modification of Thin-Film Properties (ion implantation, rapid thermal processing); Mechanical Properties and Characterization Techniques of Thin Films.

Sections	Instructor	Teaching Effectiveness			How worthwhile was this course?
Fall 2006	Sprinkle	4.9	/ 7 ± 1.0		5.3	/ 7 ± 1.2
Spring 2006	Carmena	5.6	/ 7 ± 0.4		5.7	/ 7 ± 0.4
Spring 1994	Cheung	5.6	/ 7 ± 0.5		5.6	/ 7 ± 0.4
Fall 1988	Cheung	6.4	/ 7 ± 0.6		6.3	/ 7 ± 0.6
Overall Rating		Teaching Effectiveness			How worthwhile was this course?
Electrical Engineering 290P		5.4	/ 7 ± 0.2		5.6	/ 7 ± 0.2

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