Electrical Engineering 246

[Email HKN about this data] [Info about this page]

Title	Microelectromechanical Systems (MEMS)
Units	3
Prerequisites	Graduate standing or consent of instructor.
Description	This course is aimed to provide basic understanding of integrated circuit (IC) processes and microelectromechanical system (MEMS). Technologies including analyses, design, and manufacturing processes of MEMS will be introduced. The first part of the course emphasizes IC processes including thin film deposition, lithography, and etching. The second part of the course deals with micromachining processes including surface-, bulk-micromachining, LIGA and other processes. Also listed as Mechanical Engineering C219.

Sections Instructor Teaching Effectiveness How worthwhile was this course?

Spring 2007 (none)

Spring 2005 Pisano 6.4 / 7 ± 0.4
6.1 / 7 ± 0.4

Spring 2004 Pisano 4.8 / 7 ± 1.2
4.3 / 7 ± 1.2

Spring 2002 Pisano 5.1 / 7 ± 1.7
5.1 / 7 ± 1.5

Spring 1993 Keller 5.6 / 7 ± 0.6
5.8 / 7 ± 0.6

Spring 1992 Keller 4.5 / 7 ± 0.8
4.8 / 7 ± 0.7

Spring 1991 Keller 4.7 / 7 ± 0.8
5.3 / 7 ± 0.4

Spring 1989 Keller 4.8 / 7 ± 1.1
5.8 / 7 ± 0.3

Overall Rating Teaching Effectiveness How worthwhile was this course?

Electrical Engineering 246 5.3 / 7 ± 0.2
5.3 / 7 ± 0.2

Hint: You can click on the colored rating bars to see detailed statistics on a particular rating.