Electrical Engineering 245

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Title	Introduction to MEMS Design
Instructor in Charge	Kristofer Pister
Units	3
Prerequisites	Graduate standing in engineering or science; undergraduates with consent of instructor.
Description	Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro- and nano-fabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. Also listed as Mechanical Engineering C218.

Sections Instructor Teaching Effectiveness How worthwhile was this course?

Fall 2007 Clark Nguyen 5.6 / 7 ± 0.3
5.7 / 7 ± 0.4

Spring 2007 Pisano 6.1 / 7 ± 0.4
5.2 / 7 ± 0.6

Spring 2005 Pister 5.1 / 7 ± 0.7
5.2 / 7 ± 0.6

Fall 2003 Section 1 Howe 5.4 / 7 ± 0.5
5.6 / 7 ± 0.5

Fall 2003 Section 2 Srinivasan 5.6 / 7 ± 0.4
5.8 / 7 ± 0.4

Fall 2002 Pister 5.2 / 7 ± 0.4
5.3 / 7 ± 0.4

Fall 2001 Pister 5.5 / 7 ± 0.4
5.5 / 7 ± 0.4

Fall 2000 Pister 5.7 / 7 ± 0.3
5.8 / 7 ± 0.3

Overall Rating Teaching Effectiveness How worthwhile was this course?

Electrical Engineering 245 5.5 / 7 ± 0.1
5.5 / 7 ± 0.1

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