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Electrical Engineering 143

[Email HKN about this data] [Info about this page]
TitleMicrofabrication Technologytrend
Instructor in ChargeAndrew R. Neureuther
Units4
Prerequisites40 and Physics 7B.
DescriptionIntegrated circuit device fabrication and surface micromachining technology. Thermal oxidation, ion implantation, impurity diffusion, film deposition, expitaxy, lithography, etching, contacts and interconnections, and process integration issues. Device design and mask layout, relation between physical structure and electrical/mechanical performance. MOS transistors and poly-Si surface microstructures will be fabricated in the laboratory and evaluated.
Exam FilesAvailable
Newsgroupucb.class.ee143

Sections Instructor Teaching EffectivenessHow worthwhile was this course?
Fall 2007Subramanian6.7/ 7 ± 0.2
6.3/ 7 ± 0.3
Spring 2007Subramanian6.3/ 7 ± 0.3
6.1/ 7 ± 0.4
Fall 2006Subramanian5.8/ 7 ± 0.4
5.9/ 7 ± 0.3
Spring 2006Cheung5.8/ 7 ± 0.4
5.9/ 7 ± 0.4
Fall 2005Cheung5.4/ 7 ± 0.4
5.9/ 7 ± 0.4
Spring 2005Cheung5.3/ 7 ± 0.5
5.3/ 7 ± 0.5
Fall 2004Cheung5.6/ 7 ± 0.3
5.8/ 7 ± 0.4
Spring 2004Spanos5.5/ 7 ± 0.6
6.0/ 7 ± 0.5
Fall 2003Cheung5.2/ 7 ± 0.3
5.9/ 7 ± 0.4
Spring 2003Cheung5.8/ 7 ± 0.4
5.9/ 7 ± 0.4
Fall 2002Cheung5.0/ 7 ± 0.5
5.6/ 7 ± 0.4
Spring 2002Neureuther4.7/ 7 ± 0.5
5.8/ 7 ± 0.5
Fall 2001Cheung5.3/ 7 ± 0.5
5.7/ 7 ± 0.5
Spring 2001Cheung5.5/ 7 ± 0.4
5.6/ 7 ± 0.4
Fall 2000Cheung6.0/ 7 ± 0.3
6.3/ 7 ± 0.3
Spring 2000Cheung6.0/ 7 ± 0.4
5.8/ 7 ± 0.4
Fall 1999King6.0/ 7 ± 0.4
6.0/ 7 ± 0.4
Spring 1999Cheung4.9/ 7 ± 0.7
5.8/ 7 ± 0.6
Fall 1998Oldham4.9/ 7 ± 0.6
5.5/ 7 ± 0.5
Spring 1998King6.3/ 7 ± 0.3
6.3/ 7 ± 0.4
Fall 1997Cheung5.9/ 7 ± 0.4
5.9/ 7 ± 0.4
Spring 1997Spanos5.4/ 7 ± 0.6
5.3/ 7 ± 0.7
Fall 1996Cheung5.7/ 7 ± 0.5
5.9/ 7 ± 0.5
Spring 1996Cheung5.7/ 7 ± 0.4
6.0/ 7 ± 0.4
Fall 1995Cheung6.0/ 7 ± 0.4
5.9/ 7 ± 0.4
Spring 1995Spanos4.9/ 7 ± 0.6
5.3/ 7 ± 0.5
Fall 1994Neureuther4.9/ 7 ± 0.4
5.2/ 7 ± 0.5
Spring 1994Cheung6.6/ 7 ± 0.3
6.4/ 7 ± 0.3
Fall 1993Spanos5.9/ 7 ± 0.3
6.4/ 7 ± 0.4
Spring 1993Spanos5.5/ 7 ± 0.5
5.7/ 7 ± 0.5
Fall 1992Neureuther5.2/ 7 ± 0.4
5.3/ 7 ± 0.5
Spring 1992Ko6.3/ 7 ± 0.3
6.1/ 7 ± 0.3
Fall 1991Oldham4.9/ 7 ± 0.6
4.8/ 7 ± 0.6
Spring 1991Oldham5.0/ 7 ± 0.5
5.1/ 7 ± 0.5
Fall 1990Cheung5.7/ 7 ± 0.3
5.7/ 7 ± 0.3
Spring 1990Cheung5.9/ 7 ± 0.4
6.0/ 7 ± 0.3
Fall 1989Howe5.9/ 7 ± 0.4
5.8/ 7 ± 0.4
Spring 1989Cheung5.5/ 7 ± 0.4
5.6/ 7 ± 0.3
Fall 1988Ko6.5/ 7 ± 0.2
6.2/ 7 ± 0.3

   
Overall Rating Teaching EffectivenessHow worthwhile was this course?
Electrical Engineering 143 5.7/ 7 ± 0.0
5.8/ 7 ± 0.0

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