Electrical Engineering 143

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Title	Microfabrication Technology
Instructor in Charge	Andrew R. Neureuther
Units	4
Prerequisites	40 and Physics 7B.
Description	Integrated circuit device fabrication and surface micromachining technology. Thermal oxidation, ion implantation, impurity diffusion, film deposition, expitaxy, lithography, etching, contacts and interconnections, and process integration issues. Device design and mask layout, relation between physical structure and electrical/mechanical performance. MOS transistors and poly-Si surface microstructures will be fabricated in the laboratory and evaluated.
Exam Files	Available
Newsgroup	ucb.class.ee143

Sections Instructor Teaching Effectiveness How worthwhile was this course?

Fall 2007 Subramanian 6.7 / 7 ± 0.2
6.3 / 7 ± 0.3

Spring 2007 Subramanian 6.3 / 7 ± 0.3
6.1 / 7 ± 0.4

Fall 2006 Subramanian 5.8 / 7 ± 0.4
5.9 / 7 ± 0.3

Spring 2006 Cheung 5.8 / 7 ± 0.4
5.9 / 7 ± 0.4

Fall 2005 Cheung 5.4 / 7 ± 0.4
5.9 / 7 ± 0.4

Spring 2005 Cheung 5.3 / 7 ± 0.5
5.3 / 7 ± 0.5

Fall 2004 Cheung 5.6 / 7 ± 0.3
5.8 / 7 ± 0.4

Spring 2004 Spanos 5.5 / 7 ± 0.6
6.0 / 7 ± 0.5

Fall 2003 Cheung 5.2 / 7 ± 0.3
5.9 / 7 ± 0.4

Spring 2003 Cheung 5.8 / 7 ± 0.4
5.9 / 7 ± 0.4

Fall 2002 Cheung 5.0 / 7 ± 0.5
5.6 / 7 ± 0.4

Spring 2002 Neureuther 4.7 / 7 ± 0.5
5.8 / 7 ± 0.5

Fall 2001 Cheung 5.3 / 7 ± 0.5
5.7 / 7 ± 0.5

Spring 2001 Cheung 5.5 / 7 ± 0.4
5.6 / 7 ± 0.4

Fall 2000 Cheung 6.0 / 7 ± 0.3
6.3 / 7 ± 0.3

Spring 2000 Cheung 6.0 / 7 ± 0.4
5.8 / 7 ± 0.4

Fall 1999 King 6.0 / 7 ± 0.4
6.0 / 7 ± 0.4

Spring 1999 Cheung 4.9 / 7 ± 0.7
5.8 / 7 ± 0.6

Fall 1998 Oldham 4.9 / 7 ± 0.6
5.5 / 7 ± 0.5

Spring 1998 King 6.3 / 7 ± 0.3
6.3 / 7 ± 0.4

Fall 1997 Cheung 5.9 / 7 ± 0.4
5.9 / 7 ± 0.4

Spring 1997 Spanos 5.4 / 7 ± 0.6
5.3 / 7 ± 0.7

Fall 1996 Cheung 5.7 / 7 ± 0.5
5.9 / 7 ± 0.5

Spring 1996 Cheung 5.7 / 7 ± 0.4
6.0 / 7 ± 0.4

Fall 1995 Cheung 6.0 / 7 ± 0.4
5.9 / 7 ± 0.4

Spring 1995 Spanos 4.9 / 7 ± 0.6
5.3 / 7 ± 0.5

Fall 1994 Neureuther 4.9 / 7 ± 0.4
5.2 / 7 ± 0.5

Spring 1994 Cheung 6.6 / 7 ± 0.3
6.4 / 7 ± 0.3

Fall 1993 Spanos 5.9 / 7 ± 0.3
6.4 / 7 ± 0.4

Spring 1993 Spanos 5.5 / 7 ± 0.5
5.7 / 7 ± 0.5

Fall 1992 Neureuther 5.2 / 7 ± 0.4
5.3 / 7 ± 0.5

Spring 1992 Ko 6.3 / 7 ± 0.3
6.1 / 7 ± 0.3

Fall 1991 Oldham 4.9 / 7 ± 0.6
4.8 / 7 ± 0.6

Spring 1991 Oldham 5.0 / 7 ± 0.5
5.1 / 7 ± 0.5

Fall 1990 Cheung 5.7 / 7 ± 0.3
5.7 / 7 ± 0.3

Spring 1990 Cheung 5.9 / 7 ± 0.4
6.0 / 7 ± 0.3

Fall 1989 Howe 5.9 / 7 ± 0.4
5.8 / 7 ± 0.4

Spring 1989 Cheung 5.5 / 7 ± 0.4
5.6 / 7 ± 0.3

Fall 1988 Ko 6.5 / 7 ± 0.2
6.2 / 7 ± 0.3

Overall Rating Teaching Effectiveness How worthwhile was this course?

Electrical Engineering 143 5.7 / 7 ± 0.0
5.8 / 7 ± 0.0

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